Local Charge Compensation for ZEISS FE-SEM and FIB-SEM Electron Microscopes

August 29, 2012
Local Charge Compensation with AURIGA Compact and MERLIN Compact ensures maximum information gain for insulating materials. A gas is injected into the area of interest, ionized by collision with charged particles resulting in the removal of specimen charging. Profit from convenient SEM imaging, better milling results and superior high kV analytics. For more information, visit http://www.zeiss.com/fe-sem and http://www.zeiss.com/fib-sem
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